Ferroelectric hafnium/zirconium oxide solid solutions deposited by RF magnetron sputtering with a single target

Conference presentations

E-MRS Spring Meeting 2019, May 2019, France

Oral presentation by J. Bouaziz, ECL-INL

EU flag© {2018} 3εFERRO - Energy Efficient Embedded Non-volatile Memory & Logic based on Ferroelectric Hf(Zr)O2
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 780302. All Rights Reserved. - Powered by puBBuh