TiN/Hf0.5Zr0.5O2 interface investigation by X-ray Photoelectron Spectroscopy

E-MRS Spring Meeting 2019, May 2019, France

Oral presentation by W. Hamouda, CEA


EU flag© {2018} 3εFERRO - Energy Efficient Embedded Non-volatile Memory & Logic based on Ferroelectric Hf(Zr)O2
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