TiN/Hf0.5Zr0.5O2 interface investigation by X-ray Photoelectron Spectroscopy

Conference presentations

E-MRS Spring Meeting 2019, May 2019, France

Oral presentation by W. Hamouda, CEA

EU flag© {2018} 3εFERRO - Energy Efficient Embedded Non-volatile Memory & Logic based on Ferroelectric Hf(Zr)O2
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 780302. All Rights Reserved. - Powered by puBBuh