Non-destructive XPS study of the TiN/Hf0.5Zr0.5O2 interface

Novel high-k application workshop, June 2019, Germany

Oral presentation by N. Barrett, CEA

EU flag© {2018} 3εFERRO - Energy Efficient Embedded Non-volatile Memory & Logic based on Ferroelectric Hf(Zr)O2
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 780302. All Rights Reserved. - Powered by puBBuh