TiN/ZrxHf1-xO2/Ge metal-ferroelectric-semiconductor capacitors by plasma assisted molecular beam deposition

INFOS 2019, July 2019, UK

Oral presentation by A. Dimoulas, NCSRD

EU flag© {2018} 3εFERRO - Energy Efficient Embedded Non-volatile Memory & Logic based on Ferroelectric Hf(Zr)O2
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 780302. All Rights Reserved. - Powered by puBBuh