Performance Assessment of BEOL-integrated HfO2-based Ferroelectric Capacitors for FeRAM Memory Arrays

Silicon Nanoelectronics Workshop 2020, 13-14 June (Virtual)

Invited talk by L. Grenouillet, T. Francois, J. Coignus, N. Vaxelaire, C. Carabasse, F. Triozon, C. Richter, U. Schroeder, and E. Nowak

EU flag© {2018} 3εFERRO - Energy Efficient Embedded Non-volatile Memory & Logic based on Ferroelectric Hf(Zr)O2
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 780302. All Rights Reserved. - Powered by puBBuh