Nanosecond Laser Anneal (NLA) for Si-implanted HfO2 Ferroelectric Memories Integrated in Back-End Of Line (BEOL)

Presentation by L. Grenouillet, T. Francois, J. Coignus, S. Kerdilès, N. Vaxelaire, C. Carabasse, F. Mehmood, S. Chevalliez, C. Pellissier, F. Triozon, F. Mazen, G. Rodriguez, T. Magis, V. Havel, S. Slesazeck, F. Gaillard, U. Schroeder, T. Mikolajick, and E. Nowak

EU flag© {2018} 3εFERRO - Energy Efficient Embedded Non-volatile Memory & Logic based on Ferroelectric Hf(Zr)O2
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 780302. All Rights Reserved. - Powered by puBBuh