Annealing effect on hafnium/zirconium oxides solid solution deposited by reactive magnetron sputtering on silicon

WODIM 2018, June 2018, Germany

Oral presentation by B. Vilquin, ECL-INL

EU flag© {2018} 3εFERRO - Energy Efficient Embedded Non-volatile Memory & Logic based on Ferroelectric Hf(Zr)O2
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 780302. All Rights Reserved. - Powered by puBBuh