Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2-Based Metal–Insulator–Metal Structures: The Impact of Annealing Gas

Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2-Based Metal–Insulator–Metal Structures: The Impact of Annealing Gas

: Journal Publications

Published in physica status solidi (RRL) – Rapid Research Letters (23 February 2021)

DOI: 10.1002/pssr.202100027

By Thomas Szyjka, Lutz Baumgarten, Terence Mittmann, Yury Matveyev, Christoph Schlueter, Thomas Mikolajick, Uwe Schroeder, and Martina Müller