Published in Journal of Vacuum Science & Technology A (27 December 2021)
DOI: https://doi.org/10.1116/6.0001491
By
Published in Journal of Vacuum Science & Technology A (27 December 2021)
DOI: https://doi.org/10.1116/6.0001491
By Martina Müller, Patrick Lömker, Paul Rosenberger, Mai Hussein Hamed, David N. Mueller, Ronja A. Heinen, Thomas Szyjka, and Lutz Baumgarten