BEOL Integrated Ferroelectric HfO2 based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions

Published in IEEE Journal of the Electron Devices Society (11 August 2022)

DOI: 10.1109/JEDS.2022.3198138

By R. Alcala, M. Materano, P.D. Lomenzo, L. Grenouillet, T. Francois, J. Coignus, N. Vaxelaire, C. Carabasse, S. Chevalliez, F. Andrieu, T. Mikolajick, and U. Schroeder

EU flag© {2018} 3εFERRO - Energy Efficient Embedded Non-volatile Memory & Logic based on Ferroelectric Hf(Zr)O2
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 780302. All Rights Reserved. - Powered by puBBuh